Micro gas flow measurement and flow control is one of the components of metrology science and technology, and plays an indispensable role in industrial production, scientific research, environmental protection, energy storage and transportation accounting, national defense settlement and many other aspects. The demand of the market is also increasing year by year.

Micro gas flow measurement has been widely used in aerospace, semiconductor processing, medical biology, electronic automobile and other industries.

Micro gas flow measurement requires higher accuracy and reliability of measuring instruments. Gas flow instrumentation traceability detection, the need for higher precision gas flow device as a reference standard. And because the gas flow meter in the actual use process, the flow meter needs to be verified and calibrated every once in a while. And some flowmeters are generally installed on the pipeline, there is inconvenient disassembly or disassembly of the inspection time is longer. Then the verification and calibration of  micro gas flowmeter requires a calibration device with high precision and superior uncertainty.

EUCA Technology Co., Ltd. cooperated with a metering institute in Nantong, using laminar flow elements and high-precision pressure sensors to develop a small and micro gas flow measurement standard device LFR100.

The device has the function of temperature, humidity and pressure compensation. The expansion uncertainty is better than 0.5% (k=2), and the flow rate is from 1ml/min to 100l/min.

LFR100 micro gas flow measurement standard is suitable for on-site verification and calibration of gas flowmeters, which can be used to verify and calibrate environmental monitoring station flow standards, gas samplers, online flow meters, etc.

This device has been successfully applied to a metrological verification and testing institute in Nantong City.